Advanced MEMS Fabrication Using CMP

摘要

Developed in the research labo- ratories over the past 15 years, microsystems and the accom- panying fabrication tech- niques have recently begun to move from the labs onto the manufacturing floors. Typical MEMS products, which are already fabricated in large quantities, include acceleration sensors, gyroscopes and pressure sensors for the automotive industry. Opti- cal switches for optical fiber networks and RF switches for tunable capacitors, filters or antennas for cell phones are typical telecom applications. Printing heads for inkjet printers or read/write heads for hard disk drives are used in bulk quantities in office applications. Market forecasts predict annual growth rates for MEMS products of ～20% for the coming years, exceeding the predicted growth rates for microelectronic devices.