A decoupled 2-DOF flexure-based micropositioning stage with large travel ranges

摘要

In this paper, a new flexure-based micropositioning stage (FMPS) is proposed to achieve decoupled XY translational motions and large travel ranges. The stage consists of four independent kinematic chains, each comprising two flexure-beam prismatic joints. The mechanism with such a special topological structure enables the motions of the platform strictly along XY axes and minimizes the parasitic rotation in theta axis. The kinematics and dynamics analysis of the mechanism are conducted to evaluate the performance of the mechanism in terms of travel range, parasitic motions, linearity, as well as natural frequency. According to the developed models, a parameter optimization of the mechanism is performed under the condition of the maximum travel range. The finite element simulation is carried out to examine the mechanical performance and the theoretical models. The experimental results show that the proposed FMPS possesses a workspace of 600 × 600 μm~2, a relative coupling error of 0.6%, and the natural frequencies of 209.7 Hz and 212.4 Hz for the first two modes.