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Development of A New Type of 2-DOF Piezo-Actuated Pseudo-Decoupled Compliant Mechanism for Elliptical Vibration Machining

机译:用于椭圆振动加工的新型2-DOF压电致动伪解耦柔顺机构的开发

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摘要

Currently, the elliptical vibration cutting/coining (EVC2) has been widely employed in fabricating various functional microstructure surfaces applied in many significant engineering fields. Therefore, for this study, a novel type of two-degree-of-freedom (2-DOF) piezoelectrically actuated pseudo-decoupled compliant mechanisms (PDCMs) with non-orthogonal decoupling structures, which can exactly generate the strict ellipse trajectories, was developed for improving the forming accuracies of the EVC2 microstructures. First, the compliance matrices of 2-DOF PDCMs were theoretically modeled using the popular finite beam-based matrix modeling (FBMM) and the matrix-based compliance modeling (MCM) methods, then finite element analysis (FEA) was adopted to verify the effectiveness of the built compliance model for the 2-DOF PDCM with arbitrary structure parameters. Second, the static FEA method was employed to systematically reveal the dependencies of the tracking accuracies of the elliptical trajectories on the decoupling structures of 2-DOF PDCMs. Moreover, their main dynamic performances were also investigated through the FEA-based harmonic response analysis and modal analysis. On these bases, the critical angle of the decoupling structure was optimally set at 102.5° so that the PDCMs had minimum shape distortions of the ellipse trajectories. Thirdly, a series of experiments was conducted on this PDCM system for practically investigating its kinematic and dynamic performances. The actual aspect ratio between the major axis and minor axis of the ellipse trajectory was approximately 1.057, and the first-order and second-order resonant frequencies were 863 Hz and 1893 Hz, respectively. However, the obtained testing results demonstrated well the effectiveness and feasibility of 2-DOF PDCM systems in precisely tracking the ellipse trajectories with different geometric parameters. Several critical conclusions on this study are summarized in detail in the final section of this paper.
机译:目前,椭圆振动切割/压印(EVC 2 )已广泛用于制造在许多重要工程领域中应用的各种功能微结构表面。因此,对于本研究,开发了一种新型的具有非正交解耦结构的两自由度(2-DOF)压电致动伪去耦顺应性机构(PDCM),它可以精确地生成严格的椭圆轨迹。用于提高EVC 2 微观结构的形成精度。首先,使用流行的基于有限波束的矩阵建模(FBMM)和基于矩阵的一致性建模(MCM)方法对2-DOF PDCM的一致性矩阵进行理论建模,然后采用有限元分析(FEA)验证有效性具有任意结构参数的2-DOF PDCM的已建立合规性模型。其次,采用静态有限元分析方法来系统地揭示椭圆轨迹跟踪精度对2-DOF PDCM的解耦结构的依赖性。此外,还通过基于FEA的谐波响应分析和模态分析研究了它们的主要动态性能。在这些基础上,将去耦结构的临界角最佳设置为102.5°,以使PDCM具有最小的椭圆轨迹形状畸变。第三,对该PDCM系统进行了一系列实验,以实际研究其运动性能和动态性能。椭圆轨迹的长轴和短轴之间的实际纵横比约为1.057,一阶和二阶共振频率分别为863 Hz和1893 Hz。然而,获得的测试结果很好地证明了2-DOF PDCM系统在精确跟踪具有不同几何参数的椭圆轨迹方面的有效性和可行性。本文的最后一部分详细总结了有关这项研究的几个关键结论。

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