Development of a synchrotron biaxial tensile device for in situ characterization of thin films mechanical response

摘要

We have developed on the DIFFABS-SOLEIL beamline a biaxial tensile machine working in the synchrotron environment for in situ diffraction characterization of thin polycrystalline films mechanical response. The machine has been designed to test compliant substrates coated by the studied films under controlled, applied strain field. Technological challenges comprise the sample design including fixation of the substrate ends, the related generation of a uniform strain field in the studied (central) volume, and the operations from the beamline pilot. Preliminary tests on 150 nm thick W films deposited onto polyimide cruciform substrates are presented. The obtained results for applied strains using x-ray diffraction and digital image correlation methods clearly show the full potentialities of this new setup. © 2010 American Institute of Physics Article Outline INTRODUCTION BIAXIAL TENSILE MACHINE DESIGN STRAIN AND STRESS FIELDS Equibiaxial loading Nonequibiaxial loading TUNGSTEN COATED POLYIMIDE SUBSTRATE TESTING Characteristics of the films X-ray strain analysis Experimental responses CONCLUSION AND PERSPECTIVES