Study of Elastic Behavior of Metallic Thin Films by 2D Synchrotron XRD and in situ Tensile Testing

摘要

Understanding the mechanical behavior of nano-structured thin films in relation to their structure, in particular to the grain size, is of high importance for the development of technological applications. In this work, model nanometric multilayer W/Au systems exhibiting different structures are elaborated. These films are supported by a (thin) polyimide substrate. Films mechanical response is characterized experimentally by tensile tests carried out in-situ in a X-ray diffractometer set on a synchrotron source. Transmission X-ray diffraction has been used to study the deformations of both W and Au sublayers as a function of the applied load. This geometry has been developed in the aim of optimizing the experiment time.