A measuring system for mechanical characterization of thin films based on a compact in situ micro-tensile tester and SEM moire method

摘要

A measuring system for mechanical characterization of thin films based on a compact in situ micro-tensile tester and scanning electron microscope (SEM) moire method is proposed. The load is exerted by the tensile tester and the full field strain is measured by SEM moire method. The configuration of the tensile tester and the principle of SEM moire method are introduced. In the tensile tester, a lever structure is designed to amplify the displacement imposed by lead-zirconate-titanate (PZT) actuator. The SEM moire method is applied to measure the strain of the thin film, including both the average strain in the gage section and the local strain distribution at a specific region. As an application, the measuring system is applied to characterize the mechanical property of the free-standing aluminum thin film. The experimental results demonstrate the feasibility of the system and its good application potential for mechanical behavior analysis of film-like materials.