Reduced computation for Soft X-ray propagation model

摘要

A propagation model for Extreme Ultraviolet (EUV) and/or Soft X-Ray (SXR) radiation will be described, for predicting the radiation distribution in a target position along the propagation direction. EUV and/or SXR propagation models may for example be used to predict the radiation distribution of diffracted radiation at a detector a distance z away from the diffraction target, as illustrated in figure 1.