Development and Study of Applications Combining Nanopowder Imprint Lithography and Array-Type UV-Curing Technology for Micro-Lens Molding

摘要

This study developed creative imprinting technology, combining nano-imprint lithography and array-type UV-curing technology. It used nanopowders as the method to transmit imprint force, and integrated technical features, such as soft lithography, light-curing resistant and gas-assisted imprint technology, in order to study the development of technological processes of micro-lens array manufacturing, and mature the application and technology of nano-imprinting. According to research results, SUS 304 stainless steel sheet with a micro-hole array could be smoothly fabricated into an original micro-lens array mold upon gas-assisted micro-hot embossing. At the same time, a micro-lens array structure with a complementary external form could be precisely remolded and reproduced by PDMS. Complete molding of micro-lens could be effectively achieved by combining imprints of gas-assisted lithography developed in this study, and even UV-NIL. The effective imprinting area and reproducibility of transfer printing could be greatly improved when a micro-lens contacts perfectly with a substrate surface. Moreover, since PDMS soft molds have short remolding times, and are easily feathered during manufacturing, production costs could be effectively reduced through features such as, low surface free energy, resistant to adhering to the mold during imprinting, and collocation of gas-assisted nanopowder imprinting of micro-structural processes.