Apparatus and method for improving inaccuracy of imprint force application in imprint lithography

摘要

Problem to be solved: to provide an imprint apparatus for calibrating an imprint force.The imprinting apparatus includes an imprint head, at least one cable assembly 60 for supplying signals to the print head, and a cable assembly sensor for detecting the state of the at least one cable assembly.The signal may include one or more of a voltage signal, a current signal, and an air signal.The cable assembly sensor may include a strain gauge 50 that measures the distortion of the at least one cable assembly, or a load cell that measures the force on the at least one cable assembly.Changes in measured strain and / or force are applied to calculate an adjusted new set point for imprint force.Diagram