Modeling and applications of silent discharge plasmas

摘要

The nature of the silent discharge (dielectric barrier discharge) is reviewed. Theoretical models for describing its discharge physics and ensuing plasma chemistry are presented. The phenomena leading to gas breakdown in such electrode configurations at about atmospheric pressure are discussed. The current transport takes place within a large numer of short-lived microdischarges, the plasma conditions of which are investigated. The theoretical predictions are compared to measurements. Two entirely different applications of silent discharges are treated: industrial ozone production and the formation of excimers to generate ultraviolet radiation. The special capability of the silent discharge for large-scale industrial processing is demonstrated.