Silent discharge plasma generating method and silent discharge plasma device

摘要

I offer does not require a silent discharge plasma device added gas and high efficiency. Silent discharge plasma apparatus for generating plasma by discharge gas by applying an AC voltage between two electrodes which are arranged opposite, with a dielectric at least one between the electrodes, supplies a gas between the electrodes In, the at least one surface of the surface in contact with the discharge or dielectric electrodes, semi-conductive in the oxide, noble metal particles are dispersed to be a 10wt% less than 0.05wt% by weight or more with respect to the oxide I was provided a discharge of the boundary layer.