SILENT DISCHARGE PLASMA DEVICE AND METHOD FOR GENERATING PLASMA BY SILENT DISCHARGE

摘要

Disclosed is a highly efficient silent discharge plasma device which does not require an additive gas.Specifically disclosed is a silent discharge plasma device, which comprises two electrodes that are arranged so as to face each other and at least one dielectric body that is arranged between the electrodes, and which causes an electric discharge of a gas by supplying the gas between the electrodes and applying an alternating current voltage between the electrodes, thereby generating plasma. At least one of the surfaces of the electrodes or the dielectric body, said surfaces being in contact with the electric discharge, is provided with a semiconductive discharge boundary layer that is obtained by dispersing fine noble metal particles in an oxide in such an amount that the weight ratio of the fine noble metal particles to the oxide is 0.05-10 wt% (inclusive).