Performance analysis of a radio-frequency induction plasma generator using nonlinear state-space approach

摘要

A free-running induction plasma generator was numerically simulated using an iterative nonlinear state-space method. The reflected resistance of the radio-frequency induction-coupled plasma (RF-ICP), together with its inductance, were extracted from a two-dimensional (2-D) model of RF-ICP and were represented in the generator circuit model as an equivalent resistor and inductor. Matching of the generator's operating condition with that of the RF-ICP was achieved iteratively. The model is able to predict local plasma conditions, coupling efficiency, and the steady-state output signals of the generator. The model can serve as a design tool for the induction plasma generator.