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INDUCTION COUPLED PLASMA ANALYSIS SYSTEM AND INDUCTION COUPLED PLASMA ANALYSIS METHOD

机译:感应耦合等离子体分析系统和感应耦合等离子体分析方法

摘要

The present invention provides an induction coupled plasma analysis system for measuring the light emission state of a plasma to which a sample of an object to be measured is supplied, the induction coupled plasma analysis system being provided with a spectroscope for decomposing emitted light in a measurement region set in a plasma into a plurality of wavelength components, a detection device for detecting the spatial distribution of the decomposed light, and a measurement device for measuring the detected spatial distribution at least for each of a measurement unit time which is shorter than the time taken for the sample to pass through the measurement region.
机译:本发明提供了一种感应耦合等离子体分析系统,该系统用于测量向其提供了待测对象的样品的等离子体的发光状态,该感应耦合等离子体分析系统设有用于分解测量中的发射光的分光镜。在等离子体中设置为多个波长成分的区域,用于检测分解光的空间分布的检测装置,以及至少在比该时间短的测量单位时间中的每一个中对检测到的空间分布进行测量的测量装置使样品通过测量区域。

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