S-shaped magnetic macroparticle filter for cathodic arc deposition

摘要

A new magnetic macroparticle filter design consisting of two 90/spl deg/ filters forming an S shape is described, The transport properties of this S filter are investigated using Langmuir and deposition probes. It is shown that the filter efficiency is the product of the efficiencies of two 90/spl deg/ filters, and the deposition rate is still acceptably high to perform thin-film deposition. Films of amorphous hard carbon have been deposited using a 90/spl deg/ filter and the S filter, and the macroparticle contents of the films are compared.