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Pulse shaping for optimal energy deposition with a cold cathode electron gun for surface treatment

机译:使用冷阴极电子枪对脉冲进行整形以获得最佳的能量沉积,以进行表面处理

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A pulse-forming network is added in the discharge circuit of a cold-cathode electron gun that gives rise to an improved shape of the pulse, making it closer to the ideal square pulse needed for optimal energy deposition in material surface treatments. It is shown that the circuit can be very accurately designed by means of simulations using empirical equations for the nonlinear response of the gun. Due to the particular nonlinear behavior of the current-voltage in these guns, and the strong nonlinear self-focusing of the beam, the adequate shaping of the temporal profile of the discharge becomes relevant to the efficiency of the system. The effect of using a new discharge circuit for a glow-discharge pulsed electron gun for materials processing is analyzed, showing an almost two-fold improvement in the efficiency of the system regarding the fraction of the energy not wasted in long pulse tails.
机译:在冷阴极电子枪的放电电路中增加了一个脉冲形成网络,该网络可改善脉冲形状,使其更接近在材料表面处理中进行最佳能量沉积所需的理想方波。结果表明,通过使用经验方程对喷枪的非线性响应进行仿真,可以非常精确地设计电路。由于这些喷枪中电流-电压的特定非线性行为,以及电子束强烈的非线性自聚焦,放电时间轮廓的适当整形变得与系统效率相关。分析了将新的放电电路用于辉光放电脉冲电子枪进行材料处理的效果,结果表明,就长脉冲尾部中没有浪费的能量而言,该系统的效率几乎提高了两倍。

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