Diamond-Shaped Microplasma Device Using Thick Photoresist as a Barrier Rib in Ne–Ar Gas Mixtures

Kim S.-O.

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Diamond-Shaped Microplasma Device Using Thick Photoresist as a Barrier Rib in Ne–Ar Gas Mixtures

机译：Ne-Ar气体混合物中使用厚光刻胶作为阻挡肋的菱形微等离子体装置

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The discharge characteristics of the diamond-shaped microplasma devices with pure neon, neon–1% argon, and neon–5% argon gas mixtures are investigated. The 5 $times$ 5 arrays of diam

机译：研究了具有纯氖气，氖气–1％氩气和氖气–5％氩气混合物的菱形微等离子体装置的放电特性。 5个$ times $ 5个数组

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《IEEE Transactions on Plasma Science》 |2008年第4期|p.1242-1243|共2页
作者
Kim S.-O.;
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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);
原文格式 PDF
正文语种 eng
中图分类等离子体物理学;
关键词
Glow discharge; microdischarge;

机译：辉光放电;微放电;

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1. Microplasma Device Utilizing SU-8 Photoresist as a Barrier Rib [J] . Kim S.-O. IEEE Transactions on Plasma Science . 2008,第4期

机译：利用SU-8光刻胶作为阻挡肋的微等离子体装置
2. Improvement of TMR Effect of MTJ Films With Very Thin MgO Barrier Sputtered by Ar-Ne Gas Mixture at Low RA Product Below 1.0 $Omegamu{hbox {m}}^{2}$ [J] . Noma K., Komagaki K., Sunaga K., IEEE Transactions on Magnetics . 2008,第期

机译：在低于1.0的低RA乘积下，用Ar-Ne气体混合物溅射非常薄的MgO阻挡层，改善了MTJ薄膜的TMR效果$ Omegamu {hbox {m}} ^ {2} $
3. Contribution of Stark broadening to the Balmer Ha line profile observed from barrier discharges in Ar/H-2 gas mixtures [J] . Janus HW Journal of Physics, D. Applied Physics: A Europhysics Journal . 2007,第12期

机译：从Ar / H-2气体混合物的势垒放电观察到，斯塔克变宽对Balmer Ha线轮廓的贡献
4. A confinement of microplasmas in an array of polymeric channels for optical amplification in Ar/Xe gas mixtures [C] . Jimmy Heng Kan Ni, Yin Huang, Shengyuan Zhong, Progress In Electromagnetic Research Symposium . 2016

机译：在聚合物通道阵列中限制微等离子体，以便在Ar / Xe气体混合物中进行光学放大
5. Correction of aspect ratio dependency in deep silicon etch using SF6/C4F8/Ar gas mixture. [D] . Bates, Robert Lee. 2014

机译：校正使用SF6 / C4F8 / Ar气体混合物进行深硅蚀刻时的长宽比依赖性。
6. Micropatterning Method for Porous Materials Using the Difference of the Glass Transition Temperature between Exposed and Unexposed Areas of a Thick-Photoresist [O] . Hidetaka Ueno, Kiichi Sato, Kou Yamada, 2020

机译：利用厚光刻胶曝光区和非曝光区之间玻璃化转变温度的差异对多孔材料进行微图案化的方法
7. Microplasma Device Utilizing SU-8 Photoresist as a Barrier Rib [O] . Sung-O Kim 2008

机译：利用SU-8光刻胶作为障肋的显微血模具装置
8. Tests of aerodynamically heated multiweb wing structures in a free jet at Mach number 2 : four aluminum-alloy models of 20-inch chord and span with 0.064-inch-thick skin, 0.025-inch-thick ribs and webs, and zero, one, two, or three chordwise ribs [R] . Davidson, John R, Rosecrans, Richard, Vosteen, Louis F 1958

机译：在马赫数2的自由射流中测试空气动力学加热的多翼机翼结构：四个20英寸弦和跨度的铝合金模型，0.064英寸厚的表皮，0.025英寸厚的肋和腹板，零，一，两个或三个弦向肋骨

Diamond-Shaped Microplasma Device Using Thick Photoresist as a Barrier Rib in Ne–Ar Gas Mixtures

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