机译:使用激光辅助化学气相沉积和激光辅助等离子体增强化学气相沉积的两步制造,用于长寿命有机发光二极管
Department of Mechatronics Engineering Konkuk University Chungju 27478 South Korea;
Advanced Functional Technology R&D Department Korea Institute of Industrial Technology (KITECH) Yeonsu-gu Incheon 21999 South Korea;
Manufacturing Process Platform R&D Department Korea Institute of Industrial Technology (KITECH) Sangnok-gu Ansan-si 15588 South Korea;
Manufacturing Process Platform R&D Department Korea Institute of Industrial Technology (KITECH) Sangnok-gu Ansan-si 15588 South Korea;
Manufacturing Process Platform R&D Department Korea Institute of Industrial Technology (KITECH) Sangnok-gu Ansan-si 15588 South Korea;
Thin film encapsulation; Organic light emitting diodes; Silicon nitride; Laser assisted plasma enhanced chemical vapor; deposition;
机译:氢辅助低温等离子体增强薄膜封装层的化学气相沉积,用于顶部发射有机发光二极管
机译:低温等离子体化学气相沉积法制备有机发光二极管封装阻挡层:SiOxNy薄膜参数优化研究
机译:紫外激光辅助化学气相沉积法低温沉积无机薄膜
机译:SiN_x的表面波等离子体化学气相沉积,用于有机发光显示器的薄膜封装
机译:氧化铟基透明导电氧化物薄膜的金属有机化学气相沉积:前体合成,膜生长和表征及其在聚合物发光二极管器件中的应用。
机译:193 nm ArF受激准分子激光在激光辅助等离子体增强SiNx的化学气相沉积中的作用以进行低温薄膜封装
机译:微晶P-SiC / I-Si / N-Si薄膜太阳能电池的性能改进通过使用激光辅助等离子体增强化学气相沉积