Preparation and characterization of highly transparent and conductive indium-zinc oxide thin films deposited by pyrolysis spray technique

摘要

Ternary compound films of ZnO-In_2O_3 system were prepared by spray pyrolysis method. The films were deposited on heated glass substrates by pyrolytic decomposition of zinc chloride and indium chloride in distilled water with different ratio x of [Zn] to [Zn + In] (x = [Zn]/[Zn + In]). The phase change, chemical composition, electrical and optical properties of the Zn-In oxides were investigated over wide range of ratio x. Quasi-amorphous sub-oxide films with thickness of 200-400 nm were first obtained, the films were then annealed in Argon atmosphere at 550 ℃ for 1 h. To optimize the physical properties of sprayed ZnO-In_2O_3 thin films, we carry out on a systematic study of their microstructural characterization and transport properties. Continuous structural variation from In_2O_3 to ZnO through Zn_2In_2O_5 and Zn_3In_2O_6 was observed on the deposited films with increasing the ratio x. Maximum of conductivity of 1.47 × 10~3 Ω~(-1) cm~(-1) was reached for x = 0.5 (at.%). We also concluded that the transport properties of the films are greatly governed by their microstructure.