METHOD FOR DEPOSITING TRANSPARENT CONDUCTIVE FILM BY SPRAY PYROLYSIS DEPOSITION METHOD

摘要

PROBLEM TO BE SOLVED: To reduce the time necessary for the deposition of a transparent conducive film by reducing the time required to cool a glass substrate after film forming in the deposition of the transparent conductive film by a spray pyrolysis deposition method.;SOLUTION: In the method for depositing the transparent conductive thin film on the surface of the substrate by setting the glass substrate on a substrate holding part provided with a heater and spraying a raw material solution toward the substrate heated by the heater from a nozzle, after film forming by the spray pyrolysis deposition method, the heated glass substrate is cooled without damaging by spraying a liquid coolant such as pure water, alcohol or the combined liquid or gas such as nitrogen or air to the heated glass substrate.;COPYRIGHT: (C)2003,JPO