Simulation of fine focus time-of-flight Rutherford backscattering spectrometry using TRIM backscattering data

摘要

Fine-Focus single-event time-of-flight (TOF) Rutherford backscattering spectrometry (RBS) was simulated using TRIM data together with own software. Electron- and ion trajectories were computed by taking geometric features and potential distribution within the vacuum chamber into account. TOF spectra were extracted from the trajectory data. Simulation results were in good agreement with measurements.