METHOD FOR ANALYZING RUTHERFORD BACKSCATTERING SPECTROSCOPIC ANALYSIS DATA

摘要

PURPOSE: To provide a data analysis method for analyzing, using Rutherford backscattering spectroscopic analysis method, the in-depth distribution of element concentrations in a solid sample with higher reliability and in a shorter time than with conventional methods. ;CONSTITUTION: To set an assumed distribution as to the in-depth distribution of element concentrations, an equation consisting of parameters having physical meaning is used and simulation is carried out by setting an initial value in accordance with known information about a sample. To compare a theoretical spectrum obtained through the simulation with a measured spectrum, fitting is performed by employing not gradient method but Powell method.;COPYRIGHT: (C)1996,JPO