SPECTRUM ANALYSIS METHOD IN RUTHERFORD BACKSCATTERING SPECTROMETRY, AND RUTHERFORD BACKSCATTERING SPECTROSCOPIC ANALYZER

摘要

PROBLEM TO BE SOLVED: To conduct accurate and highly reliable analysis without specifying an erroneous composition ratio, as to a spectrum analyzing method in a Rutherford backscattering spectrometry.;SOLUTION: In this spectrum analysis method in the Rutherford backscattering spectrometry wherein an observed spectrum is acquired in a prescribed scattering angle, wherein an assumed distribution is set along a depth direction of an element concentration in a solid sample, wherein a theoretical spectrum based on the assumed distribution is found by simulation, and wherein the found theoretical spectrum is compared with the observed spectrum to analyze the element concentration in the solid sample, the observed spectra in two or more of the different scattering angles are acquired in the solid sample, and the acquired observed spectra in the plurality of scattering angles are compared at the same time.;COPYRIGHT: (C)2004,JPO&NCIPI