Scattering ion detector, Rutherford backscattering analysis equipment

摘要

PPROBLEM TO BE SOLVED: To simplify and miniaturize a scattering ion detection device and to reduce its cost, which detects entering positions to ion detectors of scattering ions based on pulse current signals outputted by a plurality of the arranged ion detectors. PSOLUTION: This scattering ion detection device is equipped with: four adders 21 for adding respective four signals outputted from the plurality of ion detectors 8 and amplified by preamplifiers 11 on the basis of corresponding directions (four directions); four linear amplifiers 12 for amplifying the respective output signals thereof; signal presence detection means 22 and 23 for detecting whether one or more of the four signals amplified by the preamplifiers 11 is/are above a set level or not; and a position detection circuit 13 for detecting the entering positions of the scattering ions based on the output signals of the linear amplifiers 12 and the signal presence detection means. The position detection circuit 13 detects the entering positions of the scattering ions only when the set level or above is detected in relation to only one of the ion detectors 8 generally at the same time by the signal presence detection means. PCOPYRIGHT: (C)2005,JPO&NCIPI