首页> 外文期刊>Nuclear Instruments & Methods in Physics Research >Lateral drift-field photodiode for low noise, high-speed, large photoactive-area CMOS imaging applications
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Lateral drift-field photodiode for low noise, high-speed, large photoactive-area CMOS imaging applications

机译:横向漂移场光电二极管,用于低噪声,高速,大光敏区域CMOS成像应用

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In this work a theoretical concept and simulations are presented for a novel lateral drift-field photodetector pixel to be fabricated in a 0.35 μm CMOS process. The proposed pixel consists of a specially designed n-well with a non-uniform lateral doping profile that follows a square-root spatial dependence. "Buried" MOS capacitor-based collection-gate, a transfer-gate, and an n-type MOSFET source/drain n~+ floating-diffusion serve to realize a non-destructive readout. The pixel readout is performed using an in-pixel source-follower pixel buffer configuration followed by an output amplifier featuring correlated double-sampling. The concentration gradient formed in the n-well employs a single extra implantation step in the 0.35 μm CMOS process mentioned and requires only a single extra mask. It generates an electrostatic potential gradient, i.e. a lateral drift-field, in the photoactive area of the pixel which enables high charge transfer speed and low image-lag. According to the simulation results presented, charge transfer times of less than 3 ns are to be expected.
机译:在这项工作中,为以0.35μmCMOS工艺制造的新型横向漂移场光电探测器像素提供了理论概念和仿真。提出的像素由经过特殊设计的n阱组成,该阱具有不均匀的横向掺杂轮廓,该轮廓遵循平方根空间依赖性。基于“埋入式” MOS电容器的收集门,传输门和n型MOSFET源极/漏极n〜+浮动扩散用于实现无损读出。像素读出是通过使用像素内源跟随器像素缓冲器配置,然后是具有相关双采样功能的输出放大器来执行的。在n阱中形成的浓度梯度在上述0.35μmCMOS工艺中采用了一个额外的注入步骤,并且仅需要一个额外的掩模。它在像素的光敏区域中产生静电势梯度,即横向漂移场,从而能够实现高电荷传输速度和低图像滞后。根据给出的仿真结果,预计电荷传输时间将小于3 ns。

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