机译:评估薄膜真空MEMS封装的测试方法
Materials Innovation Institute M2i Mekelweg 2 2600 GA Delft The Netherlands;
Department of Precision and Microsystems Engineering Delft University of Technology Mekelweg 2 2628 CD Delft The Netherlands;
Department of Precision and Microsystems Engineering Delft University of Technology Mekelweg 2 2628 CD Delft The Netherlands;
NXP Semiconductors 5656 AE Eindhoven The Netherlands;
Department of Precision and Microsystems Engineering Delft University of Technology Mekelweg 2 2628 CD Delft The Netherlands;
机译:评估薄膜真空MEMS封装的测试方法
机译:基于纳米多孔氧化铝膜的MEMS晶圆级薄膜真空封装的设计,制造和测试
机译:MEMS设备晶圆级真空封装的制造和测试
机译:脉冲数字振荡器在MEMS真空包装原位测试中的应用
机译:使用焊料的MEMS真空密封包装
机译:基于晶圆级MEMS真空封装的具有全玻璃电互连的高Q共振压力微传感器
机译:评估薄膜真空MEMS封装的测试方法