首页> 外文期刊>Microelectronics & Reliability >Interfacial microstructures and glass strengthening in anodic-bonded Al sheet/glass and sputtered Al film/glass
【24h】

Interfacial microstructures and glass strengthening in anodic-bonded Al sheet/glass and sputtered Al film/glass

机译:阳极结合的铝板/玻璃和溅射铝膜/玻璃的界面微观结构和玻璃强化

获取原文
获取原文并翻译 | 示例

摘要

Two anodic bond interfaces were fabricated at 300 ℃, between glass and either an Al sheet or a sputter-deposited Al film, and their microstructures and bending strengths were comparatively studied. In the Al sheet/glass interface, numerous local intrusions of crystalline Al_2O_3 with a long (100-350 nm) dendritic structure were formed in the glass adjacent to the aluminum. However, in the sputter-deposited At film/ glass interface, a continuous, thin (~30 nm) amorphous layer with Al-oxide nanocrystals along the interface was present without the formation of dendhtes after anodic bonding. The dendritic structures in the Al sheet/glass are attributed to an electrostatic instability imposed by the roughness and local oxidation of the Al sheet surface or, presumably, by microheating via gas discharge at the interface. The bending fracture strength for both types of bonded glasses increased by approximately 1.7 times compared with that of the bare glass due to the interfacial reaction.
机译:在300℃的温度下,在玻璃与铝板或溅射沉积的Al膜之间制备了两个阳极键合界面,并对它们的组织和弯曲强度进行了比较研究。在铝板/玻璃界面中,在与铝相邻的玻璃中形成了具有长(100-350 nm)树枝状结构的大量晶体Al_2O_3局部侵入。然而,在溅射沉积的At膜/玻璃界面中,存在连续,薄(〜30 nm)的非晶态层,该界面沿界面具有Al-氧化物纳米晶体,而在阳极键合后没有形成凝结物。 Al薄板/玻璃中的树枝状结构归因于由Al薄板表面的粗糙度和局部氧化所引起的静电不稳定性,或者大概是由于经由界面处的气体放电的微加热而引起的。由于界面反应,两种类型的粘合玻璃的弯曲断裂强度比裸玻璃增加了约1.7倍。

著录项

  • 来源
    《Microelectronics & Reliability》 |2014年第3期|641-647|共7页
  • 作者

    Jong-Keun Park; Yong-Jun Oh;

  • 作者单位

    Hanbat National University, San 16-1, Dukmyung, Yusong, Daejon 305-719, Republic of Korea;

    Hanbat National University, San 16-1, Dukmyung, Yusong, Daejon 305-719, Republic of Korea;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号