机译:通过尺寸减小工艺制造的用于基于UV的纳米压印光刻的大面积纳米尺寸阵列印模
Research Institute of Micro/Nano-Science and Technology, Shanghai Jiaotong University, Shanghai 200300, PR China Core Lab of Shanghai Nanotechnology Promotion Centre, 3/f No.3 Building, 245# jiachuan Road, Shanghai 200237, PR China;
Research Institute of Micro/Nano-Science and Technology, Shanghai paotong University, Shanghai 200300, PR China;
Core Lab of Shanghai Nanotechnology Promotion Centre, 3/f No.3 Building, 245# jiachuan Road, Shanghai 200237, PR China;
Core Lab of Shanghai Nanotechnology Promotion Centre, 3/f No.3 Building, 245# jiachuan Road, Shanghai 200237, PR China;
Core Lab of Shanghai Nanotechnology Promotion Centre, 3/f No.3 Building, 245# jiachuan Road, Shanghai 200237, PR China;
Core Lab of Shanghai Nanotechnology Promotion Centre, 3/f No.3 Building, 245 jiachuan Road, Shanghai 200237, PR China;
Core Lab of Shanghai Nanotechnology Promotion Centre, 3/f No.3 Building, 245# jiachuan Road, Shanghai 200237, PR China;
UV-based nanoimprint lithography; wet etching; electron beam lithography (EBL); stamp;
机译:通过尺寸缩小光刻和纳米压印光刻制造大密度铂纳米线阵列
机译:用于纳米级电子设备制造的UV纳米压印光刻工艺优化
机译:通过结合纳米压印光刻技术和压制自完善工艺来减小尺寸的穿孔微/纳米孔膜的制造
机译:基于UV的纳米压印光刻的透明图章的替代方法-技术和材料
机译:迈向个人健康监测:利用纳米压印光刻技术制造的微流体和纳米等离子体传感器检测生物分子
机译:由热纳米压印光刻制造的纳米电极阵列用于生物传感应用
机译:纳米压印光刻技术制作的具有化学图案的平面印章的高分辨率接触印刷