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Mold for thermal nanoimprint lithography, process for fabricating the same, and nanoimprint process using the same
Mold for thermal nanoimprint lithography, process for fabricating the same, and nanoimprint process using the same
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机译:用于热纳米压印光刻的模具,其制造工艺以及使用该模具的纳米压印工艺
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摘要
A heating mold for thermal nanoimprint lithography is disclosed. According to one aspect, the mold includes a resistive heating element and collecting element for collecting the electromagnetic energy of a variable electromagnetic field emitted by a source located outside the mold. The collecting element being connected to the resistive heating element in which the electromagnetic energy is dissipated. A method for manufacturing the mold, a thermal nanoimprint lithography device including the mold, and a a method for preparing a substrate including a surface nanostructured by a thermal nanoimprint lithography technique using the mold is applied are also disclosed.
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