Thinned wafer multi-stack 3DI technology

摘要

Wafer scale 3DI technology, so-called wafer-on-a-wafer (WOW), characterized by thinned-wafer stacking and Cu multi-level interconnects, has been developed, and revealed that seven-level multi-wafer stacking is possible. The WOW process differs from the chip-on-a-chip and chip-on-a-wafer processes and can be used for wafer-scale bulk processes, enabling manufacturing from transistor to 3D stacking using wafers. Wafers are thinned down to 20-μm and bonded to the base wafer following back-to-face stacking. Through-silicon-via (TSV) holes with a diameter of 30 μm are formed and etched-off until the lower electrode of Au which is patterned on the underneath wafer. Titanium (Ti) and titanium-nitride (TiN) are formed on a TSV hole as a barrier metal and electrode for the electrochemically plated Cu (ECP-Cu). After ECP-Cu deposition, surface planarization is performed using Surface Planer?. Those wafers are used as a base wafer and multi-stacking is carried out repeatedly. The vertical connection between Cu of TSV and Au is therefore connected with a self-aligned contact and without a bump electrode. The electrical properties of the 242-chain contacts within the wafer were measured and no open failure was found. Adopting the thinned substrates eliminates deep silicon etching, and TSV filling which take a long process time, and reduces the residual stress on the Cu plug. Wafers can be stacked as much as possible in accordance with the degree of integration, and this is expected to be a low-cost and high-integration technology for post-scaling.