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A nanotechnology application for low energy neutral atom detection with high angular resolution for the BepiColombo mission to Mercury

机译:用于BepiColombo的水星任务的一种具有高角度分辨率的低能中性原子检测的纳米技术应用

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摘要

Thanks to the great progress of micro and nanofabrication techniques, only in recent years it has been possible to propose a space flying instrument able of remote-sensing the surface released neutral particles with a direct technique. This instrument, which will be installed in the BepiCoIombo/MPO spacecraft to Mercury, is the neutral sensor ELENA (Emitted Low-Energy Neutral Atoms), a time-of-flight (TOF) detector, based on the state-of-the art of ultra-sonic oscillating shutters, and Micro-Channel Plate (MCP) detection. The shuttering system digitizes space and time when tagging the incoming particles without affecting their trajectory and energy. The ELENA shuttering element consists of two self-standing silicon nitride (Si3N_4) membranes, one facing the other, patterned with arrays of 200 nm wide nanoslits, organized on a square lattice with 4 nm pitch over a 3 x 3 mm~2 area whereas in the final version it will perform a pitch of 1.4 nm, on a 10 x 10 mm~2 area. A capacitive control system is implemented to assure the alignment of the two membranes. The characterization of the shuttering capability has been obtained with a He~+ beam at 1 keV. The same fabrication process has been also used to realize a large area mesh filters, in order to reflect unwanted IR radiation to minimize the instrument heat load.
机译:由于微细加工和纳米加工技术的巨大进步,仅在最近几年,才有可能提出一种能够通过直接技术对表面释放的中性粒子进行遥感的太空飞行仪。该仪器将安装在BepiCoIombo / MPO航天器中到达水星的位置,是基于最新技术的中性传感器ELENA(发射低能中性原子),一种飞行时间(TOF)检测器。超声波振动百叶窗和微通道板(MCP)检测。当标记进入的粒子时,百叶窗系统将空间和时间数字化,而不会影响其轨迹和能量。 ELENA模板元件由两个自立的氮化硅(Si3N_4)膜组成,其中一个彼此面对,并以200 nm宽的纳米狭缝阵列进行构图,并在3 x 3 mm〜2的面积上以4 nm的间距排列在一个正方形格子中,而在最终版本中,它将在10 x 10 mm〜2的面积上执行1.4 nm的间距。实施电容控制系统以确保两个膜的对准。用1 keV的He〜+光束获得了快门能力的特征。为了反射不必要的IR辐射以最小化仪器的热负荷,还使用了相同的制造工艺来实现大面积的滤网。

著录项

  • 来源
    《Microelectronic Engineering》 |2011年第8期|p.2330-2333|共4页
  • 作者单位

    CNR - Istituto di Fotonica e Nanocecnologie. Rome, Italy;

    CNR - Istituto di Fotonica e Nanocecnologie. Rome, Italy;

    CNR - Istituto di Fotonica e Nanocecnologie. Rome, Italy;

    INAF- Istituto di Fisica dello Spazio Interplanetario, Rome, Italy;

    AMDL srl, Rome, Italy;

    CNR - Istituto Sistemi Complessi, Rome, Italy;

    INAF- Istituto di Fisica dello Spazio Interplanetario, Rome, Italy;

    INAF- Istituto di Fisica dello Spazio Interplanetario, Rome, Italy;

    INAF- Istituto di Fisica dello Spazio Interplanetario, Rome, Italy;

    INAF- Istituto di Fisica dello Spazio Interplanetario, Rome, Italy;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    time of flight detector; neutral atoms detection; electron beam lithography; mems;

    机译:飞行时间检测器;中性原子检测;电子束光刻;存储器;

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