机译:具有双面16光束质量结构的新型三明治式电容式加速度计
State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050, People's Republic of China,University of Chinese Academy of Sciences, 19A Yuquan Road, Beijing 100049, People's Republic of China;
State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050, People's Republic of China;
State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050, People's Republic of China;
State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050, People's Republic of China;
State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050, People's Republic of China;
Capacitive accelerometer; Highly symmetrical structure; 16-Beam-mass; Low cross-axis response; Three-layer silicon-silicon bonding;
机译:具有对称双面蛇形束质量结构的新型夹心差分电容加速度计
机译:具有完全对称的双面H形梁结构的MEMS电容式加速度计的设计与制造
机译:具有对称双面蛇形束质量结构的MEMS电容式加速度计的制造
机译:新型夹层电容式纳米G-微机电系统加速度计
机译:具有漂移补偿的高动态范围CMOS-MEMS电容式加速度计阵列
机译:电容式MEMS加速度计结构参数的识别用于人体动力学测量
机译:电容频率选择表面的红外发射率及其在雷达和红外兼容隐形夹层结构中的应用
机译:超塑性/扩散粘结夹层结构与蜂窝芯夹层结构的结构行为比较。