机译:用嵌入式流体纳米通道制造夹紧夹紧梁谐振器
Politecn Torino Dipartimento Sci Applicata & Tecnol I-10129 Turin Italy|Ecole Polytech Fed Lausanne EPFL STLIMT LMIS4 CH-1015 Lausanne Switzerland;
Politecn Torino Dipartimento Sci Applicata & Tecnol I-10129 Turin Italy;
Politecn Torino Dipartimento Sci Applicata & Tecnol I-10129 Turin Italy;
Ecole Polytech Fed Lausanne EPFL STI IGM NEMS CH-1015 Lausanne Switzerland;
Ecole Polytech Fed Lausanne EPFL STLIMT LMIS4 CH-1015 Lausanne Switzerland;
Ecole Polytech Fed Lausanne EPFL STI IGM NEMS CH-1015 Lausanne Switzerland;
Ecole Polytech Fed Lausanne EPFL STI IGM NEMS CH-1015 Lausanne Switzerland;
Ecole Polytech Fed Lausanne EPFL STLIMT LMIS4 CH-1015 Lausanne Switzerland;
Politecn Torino Dipartimento Sci Applicata & Tecnol I-10129 Turin Italy;
Suspended nanochannel resonator; Nanofabrication; Mass sensor; NEMS;
机译:考虑制造缺陷的夹钳式微束谐振器的动力学
机译:夹钳梁式压电能量收集器的制造与表征
机译:夹钳梁式压电能量收集器的制造与表征
机译:使用封装的夹紧夹紧MEMS光束谐振器的紧凑型高灵敏度温度传感器
机译:具有嵌入式谐振器的声学超材料的设计,制造和表征。
机译:与CMOS读出电路单片集成的悬浮纳米通道微桥谐振器的制造和测量
机译:夹紧夹持梁的压电能量收割机的制造与表征
机译:从金属纳米线图案转移的20nm嵌入纵向纳米通道的制造