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FABRICATION METHOD OF METAL GATES-EMBEDDED NANOCHANNEL
FABRICATION METHOD OF METAL GATES-EMBEDDED NANOCHANNEL
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机译:嵌入金属门的纳米通道的制备方法
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摘要
The present invention relates to a method of fabricating a nanochannel with embedded metal gates. According to an embodiment of the present invention, the fabrication method of the nanochannel with embedded metal gates includes steps of forming a first to a seventh layer on the upper surface of a substrate (101) and etching from the first to the seventh layer.
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