This work presents a piezoelectric energy harvester with clamped-clamped beams, and it is fabricated with MEMS process. When excited by sinusoidal vibration, the energy harvester has a sharp jumping down phenomenon and the measured frequency responses of the clamped-clamped beams structure show a larger bandwidth which is about 56Hz, more efficient than that with cantilever beams. When the exciting acceleration ac is 12m/s2, the energy harvester achieves to a maximum open-circuit voltage of 94mV on one beam. The load voltage is proportional to the load resistance, and it increased with the increase of load resistance. Connected four beams in series, the output power reaches the maximum value of 730 nW and the optimal load is 15KΩ to one beam.
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机译：这项工作提出了一种具有夹钳梁的压电能量收集器，它是采用MEMS工艺制造的。当被正弦振动激发时，能量收集器会出现尖锐的跳下现象，并且所测量的夹钳梁结构的频率响应显示出更大的带宽，约为56Hz，比悬臂梁的效率更高。当励磁加速度a c 为12m / s 2 时，能量收集器在一根光束上达到94mV的最大开路电压。负载电压与负载电阻成正比，并且随着负载电阻的增加而增加。串联连接的四束光，输出功率达到最大值730 nW，对于一束光，最佳负载为15KΩ。
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