Gimbal-Less MEMS Two-Axis Optical Scanner Array With High Fill-Factor

摘要

In this paper, we report on a MEMS-based two-axis optical scanner array with a high fill factor (> 96%), large mechanical scan angles (±4.4° and ±3.4°), and high resonant frequencies (20.7 kHz). The devices are fabricated using SUMMiT-V, a five-layer surface-micromachining process. High fill factor, which is important for 1 × N{sup}2 wavelength-selective switches (WSSs), is achieved by employing crossbar torsion springs underneath the mirror, eliminating the need for gimbal structures. The proposed mirror structure can be readily extended to two-dimensional (2-D) array for adaptive optics applications. In addition to two-axis rotation, piston motion with a stroke of 0.8 μm is also achieved.