High Dynamic Range AFM Cantilever With a Collocated Piezoelectric Actuator-Sensor Pair

摘要

We present a novel approach to fundamentally eliminate electrical feedthrough (cross-talk) signal in self-sensing piezoelectric microcantilevers, used in dynamic mode atomic force microscopy (AFM). The probe is an Si microcantilever on which a two-layer piezoelectric stack transducer is microfabricated. The top transducer in the stack functions as an actuator, while the bottom transducer is used as a deflection sensor. This arrangement leads to a collocated actuator-sensor pair that co-exist on the same surface area. We report experimental results that establish the sensor's ability to capture the full dynamic range of the cantilever with minimal feedthrough from the actuator. [2019-0143]