Vibration analysis of an elastically restrained microcantilever beam under electrostatic loading using wavelet-based finite element method

摘要

An electro-mechanical analysis of a microcantilever beam considering the effect of size dependence and flexible supports is presented. Both static and dynamic analyses are performed to show the coupled effect of flexible support and electrical voltage on the static and dynamic performance of the microcantilever beam. The wavelet-based finite element method (FEM) is used to derive the elastodynamic model of the microcantilever beam. The energy expressions are derived using couple stress theory, while additional energy terms are introduced to represent the flexible boundaries and fringing fields. Numerical simulations and comparisons with experimental data show the validity of the developed wavelet-based finite element model and its potential in tackling practical problems in the design and evaluation of micro-devices.