USE OF MATHEMATICAL MODELING FOR MEASUREMENTS OF NANODIMENSIONS IN MICROELECTRONICS

摘要

An "exact" mathematical model and a "simplified" mathematical model that each model video signals in a scanning electron microscope are developed. It is shown that the simplified model practically conforms to the exact model while requiring substantially lesser overhead of computational resources. Examples of the use of the models in the development of a new generation of application algorithms for precision measurement of the nanodimensional elements of modern integrated circuits are given.