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Purification of Multicrystalline Silicon by Cold Crucible Directional Solidification and Impurity Distribution

机译:冷坩埚定向凝固和杂质分布纯化多晶硅

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摘要

In order to get solar grade silicon, large cold crucible has been used in an induction heat furnace. By controlling the relative location of the crucible and coils, directional solidification was realized. More than 200 kg multi-crystalline silicon ingot was produced in a batch with short work time. The removal rate of most metal impurities was high, typically higher than 99% for transition metals like iron. Non-metallic elements such as boron and phosphorus could not be removed efficiently because of larger equilibrium segregation coefficient. The concentration of phosphorus was one third of the feedstock due to the vaporization in the melting process. The distribution of impurities agreed with the solidification principle. Quartzes and carbon was not used, which ensured silicon prevent from the contamination. Cooperated with other methods, large scale of solar grade silicon was produced.
机译:为了获得太阳能级硅,在感应加热炉中已使用大型冷坩埚。通过控制坩埚和线圈的相对位置,可以实现定向凝固。分批生产了200公斤以上的多晶硅锭,且工作时间短。大多数金属杂质的去除率很高,对于像铁这样的过渡金属,通常高于99%。由于较大的平衡偏析系数,无法有效去除硼,磷等非金属元素。由于熔融过程中的蒸发,磷的浓度为原料的三分之一。杂质的分布符合凝固原理。没有使用石英和碳,这确保了硅可以防止污染。结合其他方法,生产了大规模的太阳能级硅。

著录项

  • 来源
    《Materials science forum》 |2013年第2013期|886-891|共6页
  • 作者单位

    Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 10083, China;

    Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 10083, China;

    Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 10083, China;

    Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 10083, China;

    Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 10083, China;

    Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 10083, China;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    cold crucible; directional solidification; solar grade silicon; impurity distribution;

    机译:冷坩埚定向凝固太阳能级硅杂质分布;

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