Microelectric Discharge Plasma: Characterization and Applications

摘要

Microelectric discharge plasma characteristic using optical emission spectroscopy and its applications are reported. Planar semiconductor as well as metal electrodes as anode and metal cylindrical electrode as a cathode are utilized. Plasma parameters such as plasma temperature and electron density were measured by noncontact optical emission spectroscopy. Plasma temperature has been calculated by line pair method and electron density calculated by modified Saha equation. A comparison between the plasma temperature and electron density of discharge plasma for different electrode combinations have been investigated. Systematic variations with respect to the plasma properties have been noticed for varying energy conditions. Application of electric discharge in surface processing and elemental identification of materials have also been demonstrated.View full textDownload full textKeywordsElectron density, Elemental identification, Optical emission spectroscopy, Plasma temperatureRelated var addthis_config = { ui_cobrand: "Taylor & Francis Online", services_compact: "citeulike,netvibes,twitter,technorati,delicious,linkedin,facebook,stumbleupon,digg,google,more", pubid: "ra-4dff56cd6bb1830b" }; Add to shortlist Link Permalink http://dx.doi.org/10.1080/10426914.2012.663127