Microwave sintering of ferroelectric PZT thick films

摘要

An elliptical applicator with a focusing electromagnetic (EM) field is designed to successfully process Pb(Zr, Ti)O_3 (PZT) thick films. The 10 μm-thick PZT film on stainless steel substrate densified by microwave is based on the initial characteristics of PZT particles. Sand-mill milled PZT particles (SMPZT) are inert, but sol-gel-derived particles (SGPZT) readily absorb microwaves. Microwaves also strongly interact with core-shell (CSPZT) films. A dielectric constant of 622 and a tanδ of 4% are achieved following the treatment of CSPZT films. These ferroelectric films exhibit a coercive field of 4 kV/cm and a remanent polarization of 4 μC/cm~2 when applying a microwave power of 500 W-5 min. Microwave sintering shows a rapid densification at low temperatures for ferroelectric films on a metal substrate.