Materials characterization using high-resolution scanning-electron microscopy and x-ray microanalysis

摘要

Low-voltage field-emission scanning-electron microscopy offers the possibility to characterize a wide range of materials. Electron optics in an electron beam column have improved in recent decades and now probe diameters of 1–10 nm can be obtained, allowing a wide range of applications to be explored. This article discusses the applications of low-voltage microscopy, including the characterization of nanoparticles, super-lattice structures, and carbon nanotubes.