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机译:具有掩埋缺陷和吸收剂特征的极紫外掩模的快速三维模拟和光化检查的比较
Department of Electrical Engineering and Computer Sciences, Cory Hall, University of California, Berkeley,California 94720;
Department of Electrical Engineering and Computer Sciences, Cory Hall, University of California, Berkeley,California 94720;
Department of Electrical Engineering and Computer Sciences, Cory Hall, University of California, Berkeley,California 94720;
Department of Electrical Engineering and Computer Sciences, Cory Hall, University of California, Berkeley,California 94720;
Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, CA 94720;
Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, CA 94720;
Intel Corp., 2200 Mission College Blvd., Santa Clara, California 95054;
机译:宽带紫外线照射下光化检查表征极端紫外线光刻掩模缺陷
机译:具有掩埋缺陷的极紫外掩模的快速仿真方法和建模
机译:具有吸收剂图案的极紫外光刻掩模的光化相缺陷检测
机译:具有掩埋缺陷的EUV掩模的快速3D模拟和光化检查的比较
机译:台式,全视野,光化显微镜,用于极端紫外线光刻掩模表征。
机译:基于改进的横向剪切干涉仪的数字全息显微镜用于三维视觉检查透明物体上的纳米级缺陷
机译:利用光化学检测和快速模拟研究埋藏EUV掩模缺陷的可印刷性