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首页> 外文期刊>Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures >Resurrecting dirty atomic force microscopy calibration standards
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Resurrecting dirty atomic force microscopy calibration standards

机译:恢复脏原子力显微镜校准标准品

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摘要

Cleanliness of atomic force microscopy samples before imaging has always posed questions for users. The same is true for height calibration standards. In this shop note, the authors discuss using CO2 snow cleaning as a way to clean heavily contaminated standards and show its effectiveness in removing contamination. Further, they show that the cleaning does not damage the surface, nor alter the step heights, and can lead to improved imaging.
机译:成像前原子力显微镜样品的清洁度一直给用户带来疑问。高度校准标准件也是如此。在本车间说明中,作者讨论了使用二氧化碳除雪清洁法来清洁严重污染的标准液并显示其清除污染物的有效性。此外,他们表明清洁不会损坏表面,也不会改变台阶高度,并且可以改善成像效果。

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