Scanning field-emission force microscopy and spectroscopy of chemial-vapor-deposited carbon field-emission cathodes

摘要

A scanning-force microscope with an electrically conducting tip was used in both contact and noncontact scanning-polarization force microscopy modes to study the field-emission properties of diamond-like carbon chemical-vapor-deposited films in vacuum. Using the tip as an anode, the emission current and work function were measured with 100 nm lateral resolution. Emission was detected from individual micron-size grains. Large current fluctuations on a ms time scale were observed, correlated with large changes in surface potential, possible due to charge trapping.