METHOD OF MAKING CATHODE-GRID ASSEMBLY WITH CARBON FIELD-EMISSION CATHODE

摘要

FIELD: electronic equipment.;SUBSTANCE: invention relates to electronic engineering, namely to production of cathode-grid units with cold cathodes made from carbon material for vacuum electronic devices. Method of making cathode-grid assembly with carbon field-emission cathode involves formation on the cathode working surface of matrix of micro-edges, production of "sandwich" grid with through holes, consisting of forming and pulling grids, separated by dielectric layer, and fixation of the "sandwich" grid on cathode surface. Webs forming the grid are made from metal of transition group, which enables to connect cathode and "sandwich-grid” by partial immersion of links of forming grid into the body of cathode by thermochemical etching. This allows identical distance from vertexes of micro-tips up to pulling grid in all cells of cathode-grid unit and as a result uniformity of field emission in cathode-grid unit cells over the entire surface of cathode.;EFFECT: technical result consists in increase of uniformity of field emission in cathode-grid unit cells on the entire surface of the cathode and reliable fixation of "sandwich” grid and cathode.;1 cl, 2 dwg