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Carbon material, method for manufacturing the same material, field-emission type cold cathode using the same material and method for manufacturing the same cathode
Carbon material, method for manufacturing the same material, field-emission type cold cathode using the same material and method for manufacturing the same cathode
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机译:碳材料,相同材料的制造方法,使用相同材料的场致发射型冷阴极及其制造方法
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摘要
A field-emission type cold cathode using a carbon material as its emitter, has a plurality of acicular carbon film protrusions on its substrate electrode (1), thus having large current properties.;Also, by performing ECR plasma processing, in an atmosphere of hydrogen, on a carbon film (2) formed on the substrate electrode (1), such a field-emission type cold cathode can be easily formed that has acicular emitters made of carbon arranged close to each other.
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