CARBON MATERIAL, METHOD FOR MANUFACTURING THE SAME MATERIAL, FIELD-EMISSION TYPE COLD CATHODE USING THE SAME MATERIAL AND METHOD FOR MANUFACTURING THE SAME CATHODE

摘要

PURPOSE: A field-emission type cold cathode is provided which is capable of having a plurality of sharply shaped emitters made of such a carbon film as a diamond, with improved emission point and emission properties, thus obtaining a large emission current even at a low voltage CONSTITUTION: A field-emission type cold cathode using a carbon material as its emitter, has a plurality of acicular carbon film protrusions on its substrate electrode (1), thus having large current properties. Also, by performing ECR plasma processing, in an atmosphere of hydrogen, on a carbon film (2) formed on the substrate electrode (1), such a field-emission type cold cathode can be easily formed that has acicular emitters made of carbon arranged close to each other.