Generation mechanism of residual clamping force in a bipolar electrostatic chuck

摘要

Clamping and residual clamping forces of a Johnsen-Rahbek-type (JR-type) bipolar electrostatic chuck (ESC), which has electrically independent dual electrodes, were measured. Area ratios of the ESC's two electrodes ranged from 1 to 4.6. It was found that the clamping force per unit area decreases with increasing area ratio and that the residual clamping force per unit area increases with increasing area ratio. To reveal the mechanism of residual clamping force, an equivalent circuit model of a JR-type bipolar ESC was devised. The model showed that the residual clamping force is caused by the residual charge that results from the charge difference in two monopolar ESCs. The charge difference is due to the resistance dependency on voltage of the dielectric layer of the ESC. The wafer voltage calculated from the model agreed well with the voltage measured by an electrostatic voltmeter. It can be concluded that the model is suitable for simulating the performance of a bipolar ESC.